agilent N9201A array structure parametric test option technical overview introduction the decreasing size of features on integrated circuits (45 nm and smaller) is driving the need for new parametric test capabilities. these capabilities must accommodate the advanced test structures developed for fast yield ramp up in process integration as well as process monitoring in semiconduc- tor manufacturing. high-throughput measurement of high- volume parametric data is required to shorten the time for ramping up the process yield. this is accomplished by statistically analyzing and correcting the cause of wide range of process performance variations across a 300 mm wafer. advanced test structures, addressable array test structures that contain address decoder circuitry, and a large number of test array elements with fewer probing pads and silicon area have been developed by major semiconductor manufacturers for this purpose. the agilent N9201A parametric test option offers high throughput para- metric measurement capability for a variety of addressable array test structures (e.g. passive array, active array and clocked latched active array) with synchronized mixed operation of dc smus and digital outputs. digital outputs (parallel, serial, or clock sig- nals) are used for the address decoder that is built into addressable array test structures. this allows the selection of the speci? c array element to be measured. dc smus measure the dc voltage and current parameters of selected array elements. the dc power source is used for applying the power supply voltage (vdd) to the address decoder logic circuitry that is built-in the addressable array test structures. the N9201A is able to provide a maximum of 48 signal lines using the extended path ports of the 4070/4080 test head. this can be any combina- tion of available smus, digital outputs, and dc power source outputs. the signals pass through the 4070/4080 test head down to the probe card. the N9201A is controlled by specs (semiconductor process evaluation core software), a test shell environ- ment for the 4070 series and 4080 series. the N9201A can be provided as an upgrade for existing 4070 series and 4080 series users.
2 measurement functions dc current, dc voltage, and digital output dc measurement spot and sweep measurement unit:* high speed medium power smu (mpsmu); 8 smu minimum con? guration; smus may be added in increments of one up to a maximum of 40 smus *note: high speed mpsmu speci? cation is speci? ed at the connectors of the equipments front panel range of operation: -42 v to 42 v; -200 ma to 200 ma minimum resolution: 100 v; 5 pa maximum voltage between common and ground: 42 v ground unit (gndu) speci? cation output voltage: 0 v 100 v maximum sink current: 0.5 a output terminal/connection: triaxial connector, kelvin (remote sensing) digital output digital output characteristics: 16 digital output lines maximum when the N9201A has 8 or less smus; 32 digital output lines maximum when the N9201A has more than 8 smus output voltage: high voltage: 0.3 v to 8.0 v low voltage: 0.0 v maximum output current: 64 ma minimum state transition time: 20 s dc power source** 1 channel and gnd output rating: 0.03 v to + 10.25 v programming accuracy: voltage: 0.1% 20 mv current limit: 0.15% 20 ma **note: dc power source speci? cation is speci? ed at the connectors of the equipments front panel current range, resolution and accuracy current range force resolution measure resolution force accuracy 1 measure accuracy 2 maximum voltage 100 na 5 pa 5 pa (0.12% + 50 pa + 200 fa x vo) (0.1% + 30 pa + 200 fa x vo) 42 v 1 a 50 pa 50 pa (0.12% + 400 pa + 2 pa x vo) (0.1% + 200 pa + 2 pa x vo) 42 v 10 a 500 p pa 500 pa (0.12% + 5 na + 20 pa x vo) (0.1% + 3 na + 20 pa x vo) 42 v 100 a 5 na 5 na (0.12% + 40 na + 200 pa x vo) (0.1% + 20 na + 200 pa x vo) 42 v 1 ma 50 na 50 na (0.12% + 500 na + 2 na x vo) (0.1% + 300 na + 2 na x vo) 42 v 10 ma 500 na 500 na (0.12% + 4 a + 20 na x vo) (0.1% + 2 a + 20 na x vo) 42 v 100 ma 5 a 5 a (0.12% + 50 a + 200 na x vo) (0.1% + 30 a + 200 na x vo) 2 200 ma 10 a 10 a (0.12% +100 a + 400 na x vo) (0.1% + 60 a + 400 na x vo) 3 1 (% of output/measurement value + offset current a (? xed part determined by the output/measurement range + the proportional part that is multiplied by vo)) 2 42 v (io 20 ma), 40 v (20 ma 3 accuracy is speci? ed at temperature: 23c 5c humidity: 5% to 70% rh warm up time: at least 40 minutes. self-calibration: within one hour after calibration integration time: medium or long operation and storage operating temperature range: 5c to 30c operating humidity range: 5% to 70% (noncondensing) storage temperature -20c to 50c (< 80% rh, noncondensing) general speci? cations power requirements allowable voltage range at maximum current: 100 vac C 120 vac @ 20 a 200 vac C 240 vac @10 a regulatory and standards compliance emc: emc directive 89/336/eec, 93/68/eec iec/en61326-1 ices-001 as/nzs 2064.1 safety: low voltage directive 73/23/eec, 93/68/eec iec/en61010-1 csa c22.2 no. 61010-1 certi? cation marking: cw, c csa us, c-tick, ices/nmb-001 dimensions system cabinet: 600 mm (w) by 1050 mm (d) by 1818 mm (h) weight system cabinet: approximately 360 kg (including 40 smus, 32 digital outputs, 1 dc power source, and required cables) recommended probers and probe cards* probers: ? accretech uf3000 ? tel p12xl probe cards: ? jem (japan electronic materials co.) ? mjc (micronics japan co.) ? k&s (kulicke & soffa industries inc.) ? formfactor * please contact your local sales representative regarding the latest information on recommended probers and probe cards. 48 dut pins 4070/4080 series test head N9201A measurement hardware resources smus digital outputs dc power source N9201A-to-4070/4080 series connection capabilities maximum 48 extended ports 1 2 3 4 5 . . . . . . . . . . . . 43 44 45 46 47 48 smu1 smu3 smu5 smu7 gndu smu2 smu4 smu6 smu8 1 2 3 4 5 6 . . . . . . . . . . . . . 45 46 47 48 1 2 3 4 . . . . 39 40 1 2 3 . . . 31 32 1 gnd
web resources N9201A web site visit our N9201A web site for additional product information and literature. www.agilent.com/see/N9201A remove all doubt our repair and calibration services will get your equipment back to you, performing like new, when prom- ised. you will get full value out of your agilent equipment through- out its lifetime. your equipment will be serviced by agilent-trained technicians using the latest factory calibration procedures, automated repair diagnostics and genuine parts. you will always have the utmost con? dence in your measurements. agilent offers a wide range of additional expert test and measure- ment services for your equipment, including initial start-up assistance onsite education and training, as well as design, system integration, and project management. for more information on repair and calibration services, go to: www.agilent.com/? nd/removealldoubt www.agilent.com for more information on agilent technologies products, applications or services, please contact your local agilent of? ce. the complete list is available at: www.agilent.com/? nd/contactus americas canada 877 894 4414 latin america 305 269 7500 united states 800 829 4444 asia paci? c australia 1 800 629 485 china 800 810 0189 hong kong 800 938 693 india 1 800 112 929 japan 81 426 56 7832 korea 080 769 0800 malaysia 1 800 888 848 singapore 1 800 375 8100 taiwan 0800 047 866 thailand 1 800 226 008 europe & middle east austria 01 36027 71571 belgium 32 (0) 2 404 93 40 denmark 45 70 13 15 15 finland 358 (0) 10 855 2100 france 0825 010 700* *0.125 /minute germany 07031 464 6333 ** **0.14 /minute ireland 1890 924 204 israel 972 3 9288 504/544 italy 39 02 92 60 8484 netherlands 31 (0) 20 547 2111 spain 34 (91) 631 3300 sweden 0200-88 22 55 switzerland 0800 80 53 53 united kingdom 44 (0) 118 9276201 other european countries: www.agilent.com/? nd/contactus revised: july 17, 2008 product speci? cations and descriptions in this document subject to change without notice. ? agilent technologies, inc. 2007, 2008 printed in usa, august 8, 2008 5989-5747en agilent email updates www.agilent.com/? nd/emailupdates get the latest information on the products and applications you select.
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